Micromachined Platforms on Silicon for Micro-sofc

This communication reports on the design, fabrication and testing of special high temperature Si/SiN based micro-hotplates as micromachined platforms for micro-SOFCs. Different designs and materials have been evaluated to realise micro-heating platforms compatible with spray pyrolysed anode, cathode and electrolytes materials. The potential of these micromachined platforms for further integration of micro-SOFCs has been demonstrated with the characterisation of the properties of thin La0.6Sr0.4Co0.2Fe0.8O3 (LSCF) cathode films deposited on them. As a conclusion of these investigations, a complete process flow for the integration of all the active layers with heater current collectors and gas access through the membrane is proposed.